The SFC5000 series of digital mass flow controllers leverages Sensirion’s CMOSens technology to provide high accuracy and reliability. It enables precise control over a wide control range of 1000 : 1. Its settling time is 50 ms. The technology combines the high-precision sensor element and the analogue and digital signal processing circuitry on a single tiny CMOS silicon chip. The sensor signal is converted into a fully calibrated and temperature compensated digital signal directly on the chip. The mass flow controller features both analogue and digital interfaces, enabling features such as optional multigas, gas recognition and self-test capability.