By means of the Bronkhorst mounting concept Flow-SMS a variety of components for mass flow and pressure measurement and control can be assembled to constitute a very compact gas delivery system. On a lightweight but still rugged mounting rail system one or more mass flow (or pressure) sensor/control modules can be combined with mixing chambers, (pneumatic, electrical or manual) shut-off valves, filters or any other functional module as per customer’s request. Flow ranges can be selected between approx. 5 mln/min up to 50 ln/min or even higher. In case a pressure sensor or controller is included, the pres-sure range can be chosen between 0 to 100 mbar and 0 to 10 bar absolute or gauge. As a standard, Flow-SMS systems can be configured for up to nine channels.
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