The mobile leak detectors SM 390 and 392 are suited for the semiconductor and display industries as well as other applications that require rapid pump down and high sensivity. Both units are fully Semi S2 compliant. Leak testing even at large components in clean environments is performed by using a dry frictionless backing pump and a high vacuum pump. Both leak detectors share the same platform and are ergonomically designed with convenient size and height, a secondary handle in the front, a fully rotatable, removable display and an inlet in the front for easy connection to test ports. Thanks to a wide, clear colour touch display panel, an integrated toolbox with modular compartments and storage space for vacuum bellows, the leak detectors are user friendly.
Pfeiffer Vacuum
Hall 8.0, Booth G11